1주차 |
Orientation & Introduction |
2주차 |
Semiconductor Basics |
3주차 |
Semiconductor Devices |
4주차 |
Vacuum & CMOS Manufacturing |
5주차 |
Top-down approach : Thin Film Growth (CVD) |
6주차 |
Top-down approach : Thin Film Growth (PVD) |
7주차 |
Top-down approach : Lithography |
8주차 |
Mid-term Exam |
9주차 |
Top-down approach : Lithography |
10주차 |
Top-down approach : Advanced Lithography |
11주차 |
Top-down approach : Etch |
12주차 |
Top-down approach : Ion Implant |
13주차 |
Top-down approach : Chemical Mechanical Planarization |
14주차 |
Bottom-up approach : Spontaneous Template-based growth, Self-Assembly |
15주차 |
Final Exam |
16주차 |
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